AS ISO 17560-2006

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Adopts ISO 17560:2002 to specify a secondary-ion mass spectrometric method using magnetic-sector or quadrupole mass spectrometers for depth profiling of boron in silicon and using stylus profilometry or optical interferometry for depth scale calibration.

Product Details

Edition:

1st

Published:

10/20/2006

ISBN(s):

0733777872

Number of Pages:

10

File Size:

1 file , 770 KB

Product Code(s):

10090409, 10090404, 10090419