AS ISO 14606-2006

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Adopts ISO 14606:2000 to give guidance on the optimization of sputter depth profiling parameters using appropriate single-layered and multi-layered reference materials in order to achieve optimum depth resolution as a function of instrument settings.

Product Details

Edition:

1st

Published:

10/20/2006

ISBN(s):

0733777953

Number of Pages:

15

File Size:

1 file , 690 KB

Product Code(s):

10148313, 10148302, 10148310