AS ISO 14237-2006

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Adopts ISO 14237:2000 to specify a secondary-ion mass spectrometric method for the determination of boron atomic concentration in single-crystalline silicon, using uniformly doped materials calibrated by a certified reference material implanted with boron.

Product Details

Edition:

1st

Published:

10/20/2006

ISBN(s):

0733777929

Number of Pages:

22

File Size:

1 file , 690 KB

Product Code(s):

10103377, 10103364, 10103400