IEC 62374 Ed. 1.0 b:2007
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Provides a test method of Time Dependent Dielectric Breakdown (TDDB) for gate dielectric films on semiconductor devices and a product lifetime estimation method of TDDB failure
Product Details
- Edition:
- 1.0
- Published:
- 03/29/2007
- Number of Pages:
- 43
- File Size:
- 1 file , 720 KB