IEST RP-CC012.2

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This RP reviews factors to consider in the design of cleanroom facilities, provides a framework to establish performance criteria, and includes details on specific processes and systems. A new section on energy efficiency helps users evaluate initial costs and life-cycle costs and includes a table of energy-conserving steps. The document also covers contamination control procedures for the construction phase.

Product Details

Published:

01/01/2007

ISBN(s):

9780978786816

Number of Pages:

62

File Size:

1 file , 1.9 MB