IEST RP-CC026.2

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This RP presents guidelines for maintaining cleanroom integrity at all times, including during routine maintenance, modifications, and equipment replacement. The document provides a basis for preparing standard operating procedures for any cleanroom. It also outlines test procedures for verifying cleanliness of cleanroom apparatus and surfaces.

Product Details

Published:

09/01/2004

ISBN(s):

9781877862977

Number of Pages:

24

File Size:

1 file , 1.1 MB